Minos series

Minos mixes chemistry exactly when the process needs it: SC1 and SC2, with further media available on request. The solution is dosed under control, mixed to a defined ratio and delivered straight to the point of use.

The sequence stays closed and traceable: feed, dose, mix, verify. The instrumentation controls the flow rates, the target ratio is produced and the concentration is monitored inline. Up to three liquids at once, in a range from 1:1:1 to 100:1:1, with 1 to 11,500 litres a day and a relative pressure of 4.5 bar.

Availability comes from several protective layers: critical components can be laid out redundantly, a UPS bridges up to two hours, monitoring records trends and raises alarms, and defined automatic states cover both operation and service. Recipe, cleaning and drain cycles run on their own.

The system reaches cleanroom quality up to and including ISO 5 and is built for round-the-clock duty. It ties into the fab through Ethernet, EtherCAT, SECS/GEM, API and digital I/O. Recipe management and documentation run on the built-in IPC.

How stable that stays in operation is documented: with more than 150,000 measurement results, the deviations for deionised water, hydrogen peroxide and ammonium hydroxide remained constant and reproducible. The measurement works to ±0.1 %, with the achievable figure depending on the chemicals in question.